200 mm End-Effectors
Fala makes replacement end-effectors for 200 mm HP™, HP+™ and VHP™ robots.
Fala blades are profiled to take less space within the wafer cassette and minimize wafer scratching. Three replacable perfluoroelastomeric pads are used to contact the wafer.
200 mm Blade Product Offering
| Name | PN | Description |
|---|---|---|
| HP™ buffer | B1000 | 200 mm blade for HP™ buffer robot |
| HP™ transfer | B1200 | 200 mm blade for HP™ transfer robot and VHP™ robot |
| HP+ transfer | B20000 | 200 mm blade for HP+™ transfer robot |
| Blade Housing | B2100 | 200 mm blade for HP+™ buffer robot |
| Replacable perfluoroelastomeric pads available separately. | ||
Construction
Thin leading edge profile minimizes wafer scratching.
Aluminum base with electroless nickel coating
Three perfluoroelastomeric pads increase wafer traction.