High Performance Bearings
Fala ceramic hybrid bearings and related spare parts are used for 200 mm HP™, HP+™ and VHP™ robots. These bearings
are a direct retrofit to existing installed tools.Fala bearings incorporate several design elements that together increase bearing life and reduce contamination.
Ceramic hybrid construction and full complement 4-point design ensures maximum rigidity and eliminates wafer droop, specially when coupled with high performance blade housings.
Guaranteed Performance
All Fala bearings are warranted for 2 years or 600,000 wafer-processed. Most bearings are sold as integrated maintenance kits that include high performance blade housings.
Hub bearings are double-shielded and use an orientation independent 4-point configuration.
Fala wrist assemblies contain high precision reusable tempered pivots.
Why use Sparetech?
No costly retrofit needed!
10 years of superior results!
Cuts three 30-hour PM per tool.
Operator-independent wrist assemblies.
Comprehensive product offering!Proven Performance
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USA Customer 0.25µm logic
"We saw an immediate drop in mechanical contamination after installing Fala bearings."
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SE Asia Foundry
"Particle contamination dropped as we implemented shielded ceramic bearings."