Monitor FI robots using 3D vibration sensors

Multi-sensor displayHigh speed 3D sensors proactively monitor FI robots. Double plunger action, Z-drift and wafer scratching can be detected remotely. With full FDC integration, robots can be placed offline before scrap occurs.

Proactive CMP monitoring

High speed 3D vibration sensors keep tabs on your CMP tools. In production at multiple locations, V2-2SI sensors are used to detect problems with polisher drift, platen bearing wear, flexure ring wear and slurry injection. They can also be used to predict and extend conditioner pad life.

MSD Data Structure