Bearing Kits for RTP tools with HP™ Robot
Rapid thermal processing 200 mm tools can be rough on bearings. Fala ceramic hybrid shielded bearings with PFPE-PTFE grease give excellent performance under EPI and Gigafill™ conditions.
Fala bearings work with OEM hub and elbow joints. For optimal performance, we recommend Fala reusable pivots and blade housings.
Bearings are an important source of contamination and downtime. Fala combines shielding, 4-point, full complement, and high precision to yield a 70% reduction in contamination and a 4X improvement in bearing life.
Superior Fala housings feature full body pivots and a reverse assembly design that simplifies blade maintenance and eliminates torque requirements.
HP™ RTP Product Offering
| Name | PN | Description |
|---|---|---|
| HP™ RTP Buffer | H22540 | Hub, wrist, and elbow bearings for HP™ robot with new high precision buffer blade housing for quartz blade |
| HP™ Refill | H22570 | Hub, wrist, and elbow bearings for HP™ robot already fitted Fala housing |
| HP™ RTP housing | A2009 | Blade housing assembly for HP™ RTP robot |
| Bearings, pivots, and housings available separately. | ||
200 mm Summary Table
Many configurations exist depending on the applications
Consult our 200 mm reference table for cross-reference information.
Unmatched Performance
- Longer Life
Fala Technologies can last 4 times as long as other bearings, resulting in significantly lower cost of ownership. - No Unscheduled Maintenance
High precision Fala bearings eliminate unscheduled maintenance events. - Cleaner
Grease containment as well as precise construction keep particles at the very lowest level.