Quantum-X 300 mm - Fala recently released a bearing upgrade for the Quantum-X gripper assembly. Using reverse ceramic-hybrid bearings and surface tempering, this upgrade kit increases particle-free performance.

OEM PN 9011-02556

Ulvac 300 mm - Fala recently released an anti-backlash upgrade for the 300 mm Ulvac Keytran robot used in ENTRON deposition system. Using ceramic hybrid shielded bearings, PFPE-PTFE lubrification and modified mechanical interface, we offer loose bearing kits or fully preassembled robots. Spare wrist assemblies are available upon request.

Applied Nanopure Idler Pulley

Fala is developing a long-life replacement pulley for UV cure lamp assembly. Fits Producer ST and GT.

OEM 3610-00155

Novellus Gamma rotation kit bearings

OEM bearings within the Gamma wafer handler last less than 6 months.

Fala has designed shielded high-temperature angular bearings that are a direct retrofit and can be installed by the end-user.

PN: E1002 OEM # 15-2774

Varian/TEL MB2 robots contain bearings that need to be periodically replaced. Fala has designed special radial ceramic hybrid bearings that fit directly into the OEM robot arms. When necessary, we can repair and replace broken robot components.

SA/PE-CVD Throttle Valve Bearings

Product 1: Throttle Valve Bearing, Small, PN: E2500, OD 0.62”, ID 0.24”, Ceramic hybrid construction, shielded, angular, PFPE-PTFE lubrication

Product 2: Throttle Valve Bearing, Large, PN:E3750 OD 0.87”, ID 0.37”, Ceramic hybrid construction, shielded, angular, PFPE-PTFE lubrication