Bearings for ULVAC ENTRON PVD system
Configuration - The Fala bearing kit for the Ulvac 300 mm PVD KEYTRAN dual blade robot contains all the wrist bearings and elbow bearings necessary for normal maintenance. The bearings can be replaced by the end-user or pre-installed at our factory. Unlike the OEM parts, the Fala bearings use ceramic hybrid shielded technology with PTFE-PFPE lubricant for long trouble-free life. These bearings are used in the dual independant blade robot shown in composite form above.
Product Offering Table
| Name | PN | Description |
|---|---|---|
| Ulvac™ Standard | H10177 | 8 elbow bearings, ceramic hybrid shielded and 8 wrist bearings, ceramic hybrid shielded, lubricated, hardware kit included |
| Ulvac™ Upgrade | R10177 | All parts of H10177 + anti-backlash upgrade components. |
| Removal tool | ULV_UE | Specialty wrench for Ulvac maintenance |
| Replacement blade housings available separately. OEM Ref. 1039371A/B | ||
Quality Standards
- Higher Quality Bearings
Fala bearings are made to fine tolerances and are designed to outlast OEM parts.
- Warranty
Fala parts are guaranteed for 2 years. Some have been in continuous product for 5 years!
Unmatched Performance
- Removal tool
Fala Technologies has designed a speciality wrench that simplified the assembly and disassembly. - Shielded and lubricated!
High precision Fala bearings are shielded and lubricated for longer life.