HOT PARTS
Keep your factory humming with these replacement parts!
part_number : XP Hardware
description_1 : XP Hardware (2 complete sets)
lead_time : 14 days
XP Hardware (2 complete sets)
part_number : B1205
description_1 : Blade, aluminum, HP transfer, nickel plated, for 150 mm wafers, compatible with A1000
lead_time : 14 days
Blade, aluminum, HP transfer, nickel plated, for 150 mm wafers, compatible with A1000
part_number : SPTH1733501
description_1 : Transit case for XP robot, can accomodate entire motor stack and arm set
lead_time : 3 weeks
XP Robot Transit Case with wheels and lid
part_number : E3750
description_1 : Turbo Pump Replacement Part, Large
lead_time : 14 days
Turbo Part Replacement Part, Large
part_number : SPT-3D10-250012-11
preferred_application : etch
lead_time : 6 weeks
Thin Inner Cell(738)
part_number : C1003
description_1 : Cover, center, Centura single blade
lead_time : 14 days
Cover, center, Centura single blade
part_number : SPT-ES1D10-250233-11
preferred_application : etch
lead_time : 6 weeks
ELECTRODE, UPPER
part_number : HG-L-1K-220V
description_1 : Spare lamp for Velios gas injection system, 1kW, UL Version
lead_time : 3 weeks
Spare lamp for Velios gas injection system, 1kW, UL Version
part_number : R80003
description_1 : VHP Hub Assembly, pre-assembled, eHUB, PLT
description_2 : R80001
lead_time : 14 days
VHP Hub Assembly, pre-assembled, eHUB, PLT
part_number : Driver_0190-14372
description_1 : Repair Yaskawa Driver - Model 0190-14372
lead_time : 3 weeks
Repair Yaskawa Driver - Model 0190-14372
part_number : A2300
description_1 :
Replacement HDP clamp, compatible with quartz blade, for epi
preferred_application : HDP, EPI
lead_time : 2 weeks
Type: Robot Assembly
Blade clamp, contains 2 high precision 17-4 pivots and 4 wrist bearingspart_number : PMP0205114
description_1 :
Silicone membrane for CMP
preferred_application : CMP
Type: Bearings
Silicone membrane, Titan 1part_number : R40010
description_1 : XP elbow UPPER (w/ E0668)
lead_time : 14 days
XP elbow UPPER (w/ E0668)
part_number : VxP_Cover
description_1 : VxP Cover
lead_time : 14 days
VxP Cover
part_number : A2001
description_1 :
200mm HP+ Pivot LH Full
lead_time : 14 days
Type: Bearings
200mm HP+ Pivot LH Fullpart_number : PS-B4-P294
description_1 :
Battery, LiIon, with charge indicator, for E702 class light
lead_time : 2 weeks
Type: Bearings
Battery, Li-Ionpart_number : H52908
description_1 : HP+ kit (std w/wrist asm-top elbow)
description_2 : 4X E6020 - 2X E0420 - 1X A2100 HP+ buffer blade housing
lead_time : 14 days
HP+ kit (std w/wrist asm-top elbow)
part_number : SPT-1810-121988-11
preferred_application : etch
lead_time : 6 weeks
Electrode, Upper(LD-777)(SCCM-OX)
part_number : A2100
description_1 : Replacement HP+ Buffer clamp, compatible with existing OEM blade
preferred_application : PVD, CVD
lead_time : 2 weeks
Type: Robot Assembly
Blade clamp, contains 2 high precision 17-4 pivots and 4 wrist bearingspart_number : E0865
description_1 : Bearing, 52100, super-duplex, ceramic hybrid, ultrafinished, shielded, PTFE-PFPE lubricated, NEW brand FALA, for ACP SBR upper elbow
preferred_application : RTP
lead_time : 14 days
Bearing, 52100, super-duplex, ceramic hybrid, ultrafinished, shielded, PTFE-PFPE lubricated, NEW brand FALA, for ACP SBR upper elbow