Blog - Sparetech

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0040-37504_S - Door, bonded O-ring

Replacement door

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0100-00793_S - PCB, VGA

Replacement VGA Board

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0100-20068_S - Card, CCD

Replacement CCD card

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4022.480.15683_ASML - Rework, bellows assembly

Rework of pneumatic bellows assembly

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PMP02052914 - Membrane external

CMP membrane, external

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PMP02056714 - Membrane internal

CMP membrane, internal

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CSPV-1000-N - Green LED Inspection Light

Handheld LED light- green filter

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PL-6U - UV LED Inspection Light

Handheld UV light, LED, 6 W, 365 nm

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SPT-012639-024 - Injector

Nozzle injector for ALD and RIE

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SPT-ES1D10-150045-11 - baffle

PLATE BAFFLE

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