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PASCO located in Tainan, TW provides plastic, rubber, polyurethane and silicone parts for chemical mechanical polishing and plating equipment. They specialize in customized membranes for carrier heads.
Founded in 2006, Pasco supports 200 and 300 mm CMP tools from all leading OEMS.
200 mm300 mm
Membrane AMATTitan 1, Titan Center Bump, ContourProfiler 1.1, Titan Profiler, Contour, UTE 6-zone, UVO 7-zone
Membrane EbaraI Head, AI MembraneG2 (LcW), Tcnh (AGW), Tcnh T2-2, G3V2.1F
Rubber and PolyurethaneRolling seals, UTE inner tube, EVO rolling seals, Washer driver brush module, Idler
Engineered plasticBrush mount actuator, Gear assemblyPusher, Crescent drive, VDPM Desica 300, Reflexion LK/GT
Cationic MembraneSAC 300, Extreme Cell, Cu membrane, 3DXT, Extreme, Cationic LF
Plating PartsCup, knife edge, Cup APC, PPS Ring, Clamshell Cup Assy, Cone, Deflector, Pin Sabre XT
Plating lip sealSeal 296 mm, Lip, POR, SJ seal
Mixing valves and pistons0.25 mL, 0.5 mL, 1.25 mL, 2.5 mL, 5 mL, 2-way, 8-way0.25 mL, 0.5 mL, 1.25 mL, 2.5 mL, 5 mL, 2-way, 8-way