PASCO
PASCO located in Tainan, TW provides plastic, rubber, polyurethane and silicone parts for chemical mechanical polishing and plating equipment. They specialize in customized membranes for carrier heads.
Founded in 2006, Pasco supports 200 and 300 mm CMP tools from all leading OEMS.
| 200 mm | 300 mm | |
|---|---|---|
| Membrane AMAT | Titan 1, Titan Center Bump, Contour | Profiler 1.1, Titan Profiler, Contour, UTE 6-zone, UVO 7-zone |
| Membrane Ebara | I Head, AI Membrane | G2 (LcW), Tcnh (AGW), Tcnh T2-2, G3V2.1F |
| Rubber and Polyurethane | Rolling seals, UTE inner tube, EVO rolling seals, Washer driver brush module, Idler | |
| Engineered plastic | Brush mount actuator, Gear assembly | Pusher, Crescent drive, VDPM Desica 300, Reflexion LK/GT |
| Cationic Membrane | SAC 300, Extreme Cell, Cu membrane, 3DXT, Extreme, Cationic LF | |
| Plating Parts | Cup, knife edge, Cup APC, PPS Ring, Clamshell Cup Assy, Cone, Deflector, Pin Sabre XT | |
| Plating lip seal | Seal 296 mm, Lip, POR, SJ seal | |
| Mixing valves and pistons | 0.25 mL, 0.5 mL, 1.25 mL, 2.5 mL, 5 mL, 2-way, 8-way | 0.25 mL, 0.5 mL, 1.25 mL, 2.5 mL, 5 mL, 2-way, 8-way |